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ArisMD主动减震台/主动隔振台

电子显微镜主动减震台,FIB系统主动隔振台,半导体设备主动减震台,干涉仪主动隔振台,轮廓仪主动减震台,EBL电子束曝光机主动隔振台

名称:ArisMD主动减震台/主动隔振台
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ArisMD主动减震台/主动隔振台

电子显微镜主动减震台,FIB系统主动隔振台,半导体设备主动减震台,干涉仪主动隔振台,轮廓仪主动减震台,EBL电子束曝光机主动隔振台。


Description

Compact modular active vibration isolation systems counteract vibrations affecting high-precision equipment and tools.Stationedon multiple independent isolators ArisMD has the capacity to support load of massive machines up to 4000kg. Low Profile isolators provides simple installation which does not require microscope lifting and recalibration.


ArisMD主动隔振台.png



Products Spec

1. Patented Architecture

2. Highly Damped Step Respond

3. Power and Communication Box for centralized control

4. Application-specific designs/products/ capabilities to meet your needs

5. Ability to support massive machines, tools,systems

 

DeviceArisMD300ArisMD500ArisMD1000
Dimensions (WxDxH) mm230X270X75230X270X75230X370X75
Load Capacity (kg)100~300200~500500~1000


Active Isolation Range0.5 – 100 Hz
Degrees of FreedomAll 6 degree for System

Vibration Isolation 

Performance

~8db gain on 1Hz

~20db gain on 2Hz

Settling time≤0.1 sec
Actuator ForceVertical: 80 N; Horizontal 40 N

Real-TimeDiagnostic 

Tools

Built-in Real-Time 2xChannels Oscilloscope, Real Time 2xChannel Spectrum Analyzer per Module and per 

System

Real-Time performance 

adjustment

Adaptive Control in ALL degrees of freedom in real-time. Remote Access
Input VoltageAC 80-260V/50-60Hz
Transmission ChartTransmission Chart.png



Industry fields and Applications

Vibration levels should meet the specs of sensitive tools and instruments. Mostly the Fabs, Laboratories and Cleanrooms floors often fail to meet the target devicespec.


Using K&S Devices for new Fabs, Laboratories and Clean rooms reducing overall cost, meet specs, providing ultimate vibration and adaptive vibration isolation for sensitive tools and instruments could be adjusted to changed environmental conditions.


1.  Big heavy floor microscopes – SEM,TEM

2.  Semiconductor equipment

3.  X-Ray, CT,MRI 


半导体设备主动隔振台

FIB系统主动防震台.png电子显微镜主动减震台.jpg
FEI透射电子显微镜主动隔振台.jpgJEOL日本电子透射电子显微镜主动减震台.jpg电镜主动防震台.jpg
Zeiss蔡司电子显微镜主动隔振台.png日立电子显微镜主动减震台.jpg

JEOL电镜主动防震台.jpg



Installation comparisopn of ARisMDxxx systems versus another approaches


Competitive approach for installation vibration isolation systems

美国X品牌主动隔振台.png

美国X品牌主动减震台.png

日本X品牌主动防震台.png


KNS Approach

KNS主动隔振台.pngKNS主动减震台.jpgKNS主动防震台.jpg


Key Benefits

1. No need to lift precisiontool/instrument-K&S solution is very low profile,which easily integrating under the tool frame.

2. No need to reconfigure the tool after isolation - save additional configuration cost and time.
3. No need for heavy mechanical equipment and construction adaptations.
4. Shortest installation time - only few single hours for installation.
5. Very low installation cost.
6. Improves tools/instruments performance and quality.
7. Easy Integrates into tool/instrument workstation environment.


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